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| Spectroscopic ellipsometer - Horiba UVISEL | Metrology | Horiba Scientific | UVISEL Plus |
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View
| AIXEMTEC-XTB-FAS-500 | Device mounting | AIXEMTEC | XTB-FAS-500 |
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View
| Automated wafer level opto-electronic tester | Metrology | Ficontec | T1200 |
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| Automated wafer level opto-electronic tester | Metrology | Ficontec | T1200 |
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| Chemical Mechanical Polisher | Other processes | TBD | TBD |
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| Digital Microscope VHX-7000 | Metrology | Keyence | VHX-7000 |
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| Direct laser writer | Lithography | MicroWriter | ML3 |
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| Flip-chip bonder | Device mounting | Finetech | Lambda |
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| FTIR Microscope | Metrology | Brucker | LumosII |
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| Kiralux - Microoscope | Metrology | Thorlabs | kiralux - compact scientific camera |
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View
| Lithography work bench | Lithography | Burdinola / Polos | Polos Spin150/200 and Bake |
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View
| Manual electrical probe wafer tester | Metrology | Signatone | Checkmate 300 |
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| Manual wire-bond | Device mounting | TPT | HB05 |
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| Mask aligner - EVG 620NT | Lithography | EVG | 620NT |
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| Mask aligner - Tamarak | Lithography | Tamarak Scientific | 152-2000-20 |
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| Microscope Dyna 800P | Metrology | Vision Engineering Lynx | Dyna800P |
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| Micro-tranfer printer | Device mounting | X Display Company | MTP-1003 |
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| Nadetech - Spray coater | Thin film deposition | Nadetech | ND-SP 11/3 |
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| Nikon - Optical microscope | Metrology | Nikon | Optiphot 66 |
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| Nordiko cluster - PECVD N2O | Plasma deposition | Nordiko | Custom |
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| Nordiko Cluster - PECVD SiH4 / NH3 | Plasma deposition | Nordiko | 5000 |
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| Nordiko Cluster - RIE CHF3 / CF4 | Dry etching | Nordiko | 5000 |
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| Nordiko Cluster - Sputter | Thin film deposition | Nordiko | N300 |
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| Optical profilometer ITQ | Metrology | KLA Tencor | MicroXAM-100 |
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| Philips / FEI - SEM | Metrology | Philips / FEI | XL 40 |
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| Semi-Automatic Thermosonic Wedge & Ball Bonder | Device mounting | TPT | HB10 |
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| Sputter for cylinders | Thin film deposition | Leybold | TBD |
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| SPX – Thermal Product Solutions | Thermal processes | SPX – Thermal Product Solutions | IGF-6680-FY-F4-CE |
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| Sub-micron die-bonder | Device mounting | Finetech | FINEPLACER lambda |
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| Suss Spin Coater | Lithography | Polos | Spin150i |
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| Tempress - Tube 1 - Oxidation and sintering | Thermal processes | Tempress | TS81003 |
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| Tempress - Tube 2 - Low Pressure CVD | Thermal processes | Tempress | TS81003 |
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| Wafer Marker | Metrology | Sundor Laser | YLH-30E |
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| Wetbench - 1 | Wet process benches | Suzou CSE Semiconductor Technology | CSE-SC-N110 |
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| Wetbench - 2 and semicon processing tanks | Wet process benches | Ventura Orts & IMTEC | Custom |
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| VWR Ultrasonic bath | Sample prep | VWR | USC - THD |