Picture of Profiler Tencor P16+
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The P-16+ stylus profiler is a surface metrology analysis solution used in a wide range of applications and Industries, from R&D Departments and Universities to production and process monitoring. This surface analysis solution's precise force control provides excellent vertical resolution, precision, and reliability measurements. This surface analysis solution delivers automated step height analysis, surface contour, waviness and roughness measurements with detailed 2D or 3D analysis of topography for a variety of surfaces and materials.

FEATURES:

  • CMP monitoring and bump metrology.
  • Thin film thickness, roughness and stress analysis.
  • Thin film head structure definition and disk edge roll-off.
  • Microlens and diffuser shape.
  • Etch rates and trench depth analysis.
Tool name:
Profiler Tencor P16+
Area/room:
White room
Category:
Metrology
Manufacturer:
KLA
Model:
Tencor P-16+

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