Picture of Nordiko cluster - PECVD N2O
Current status:
DOWN
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Responsibles
1st Responsible:
Pascual Muñoz
2nd Responsible:
Gloria Micó
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Description
Details
Tool name:
Nordiko cluster - PECVD N2O
Area/room:
White room
Category:
Plasma deposition
Manufacturer:
Nordiko
Model:
Custom
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