LIMS - [View Tool]

No access? Apply for access here...

Username:

Password:

Tempress - Tube 2 - Low Pressure CVD (0004)

Current status:

AVAILABLE

Book | Log|

Show/Collapse all

Responsibles

1st Responsible:

Pascual Muñoz

2nd Responsible:

Files

You must be logged in to view files.

Description

Tube 2: LPCVD (SiCl2H2, NH3, O2, N2)

Funding and acknowledgements:

Retrofit of Tube 2 for LPCVD (2019) funded by GVA/IDIFEDER2018/042 project
Retrofit of Tube 2 for low stress silicon nitride LPCVD (2020) funded by GVA/IDIFEDER2021/046 project

Details

Tool name:

Tempress - Tube 2 - Low Pressure CVD

Area/room:

White room

Category:

Thermal processes

Manufacturer:

Tempress

Model:

TS81003

Tool Modes

You must be logged in to view tool modes.