Picture of Spectroscopic ellipsometer - Horiba UVISEL
Current status:
AVAILABLE
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Responsibles
1st Responsible:
Pascual Muñoz
2nd Responsible:
Adrián Fernández
Files
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Description

PLEASE OBSERVE THE QUICK START AND LOG INSTRUCTIONS IN SECTION "PROCESS INFO".

General description:

  • Spectroscopic ellipsometer - lamps with emission from 190-2100 nm wavelength.
  • Micro-spots 0.05, 0.1 and 1 mm2 in the above wavelength range.
  • Manual goniometer 55-90 deg with 5 deg steps, precision +/- 0.01 deg
  • XY motorized platform for up to 8 inch wafers
  • Precision: Ψ= 45°±0.01° and Δ=0°±0.01° measured on a direct on air configuration 1.5 – 5.3 eV
  • Repetitivity: NIST 1000Å SiO2/Si (190-2100 nm): d ± 0.1 % – n(632.8nm) ± 0.0001

Equipment acquired with public funds from project GVA/IDIFEDER/2018/042 "Micro-fabricación para fotónica, electrónica y química".

Details
Tool name:
Spectroscopic ellipsometer - Horiba UVISEL
Area/room:
White room
Category:
Metrology
Manufacturer:
Horiba Scientific
Model:
UVISEL Plus
Process info

Refer to tool document User instructions "MUST READ - QUICK START for EVERY SESSION".

Follow stricktly the steps in the first two pages for every measurement session.

  • Page 1 / Use your profile if it exists, otherwise create a new one (SurnameName)
  • Page 2 / Position sample and log the value of S0 at the beginning and end of session

The log entry should contain:

  • Fab/batch/wafer label e.g. CNM999 WAFER01 or UPVFAB_ELLIP xxx
  • Details on the sample/layers e.g. SiO2/Si or Si3N4/SiO2/Si ...
  • START OF SESSION: value of S0 after the adjustment of Page 2 in the aformentioned document
  • END OF SESSION: value of S0 after the adjustment of Page 2 in the aformentioned document

THE TOOL IS NETWORKED AND LINKED TO THE OWNCLOUD SERVER.

FURTHERMORE YOU CAN COPY YOUR FILES TO YOUR CLOUD SYSTEM.

DO NOT USE ANY USB DEVICE TO COPY YOUR RESULTS.

Instructors & Licensed Users

Instructors

Licensed Users

Tool Modes
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