UNIVEX are multipurpose coating systems for the production of functional physical deposition (PVD) layers. Features such as modular designs, variable chamber sizes and a numerous accessories make UNIVEX systems versatile across wide fields of applications

Features:

• Hopper Size: Width: 600mm - Depth: 600mm - Height: 800mm
• Thermal Vaporisation: Possibility to vaporise up to 8 materials
• Organic Vaporisation: Possibility to vaporise up to 8 materials
• Electron Beam Vaporisation: Multi-chamber and/or single chamber
• Scatter: Up or down 4X3″, 3X4″, 6X2″
• Co-Deposition : Evaporation and/or Sputtering
• Ion Assisted Coating: Optional
• Load Lock compatibility: Optional
• Water channels in the chamber walls: Optional
• Vacuum level 5X10-7mbar
• UHV Version: Optional
• Cleanroom Compatibility: Yes