The MicroXAM-100 is a full-featured whote light and phase-shifting interferomenter that brings a powerful set of features and capabilities to the general research community. The system provides precise high-resolution, non contact 3D profiles on both smooth and rough surfaces.

Features:

• Full 3D rendering ability with profile extraction
• Meets calculations for roughness, waviness, step height and geometry
• Easy sample navigation using intuitive graphical user interface and video view