Picture of Thin-Film Mapping Analyzer
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AVAILABLE
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Thin-film thickness of samples up to 450mm in diameter are mapped quickly and easily with the F50 advanced spectral reflectance system. The motorized r-theta stage moves automatically to selected measurement points and provides thickness measurements as fast as two points per second. The F50 has the same precision high-lifetime stage that performs millions of measurements in our production systems.

Choose one of dozens of predefined polar, rectangular, or linear map patterns, or create your own with no limit on the number of measurement points. The entire desktop system is set up in minutes and includes easy-to-use, intuitive software.

Tool name:
Thin-Film Mapping Analyzer
Area/room:
White room
Category:
Metrology
Manufacturer:
KLA
Model:
Filmetrics F50

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